Study on The Performance of PECVD Silicon Nitride Thin Films
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چکیده
منابع مشابه
Plasma Enhanced Chemical Vapor Deposited (Pecvd) Silicon-Rich-Nitride Thin Films For Improving Silicon Solar Cells Efficiency
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ژورنال
عنوان ژورنال: Defence Technology
سال: 2013
ISSN: 2214-9147
DOI: 10.1016/j.dt.2013.10.004